@misc{indiciae37c3afac95a7,
  title = {High-production-rate fabrication of low-loss lithium niobate electro-optic modulators using photolithography assisted chemo-mechanical etching (PLACE)},
  author = {Rongbo Wu and Lang Gao and Youting Liang and Yong Zheng and Junxia Zhou and Hongxin Qi and Difeng Yin and Min Wang and Zhiwei Fang and Ya Cheng},
  year = {2022},
  url = {https://arxiv.org/abs/2201.10790},
  note = {Source identifier: 2201.10790}
}