TY  - RPRT
TI  - High-production-rate fabrication of low-loss lithium niobate electro-optic modulators using photolithography assisted chemo-mechanical etching (PLACE)
AU  - Rongbo Wu
AU  - Lang Gao
AU  - Youting Liang
AU  - Yong Zheng
AU  - Junxia Zhou
AU  - Hongxin Qi
AU  - Difeng Yin
AU  - Min Wang
AU  - Zhiwei Fang
AU  - Ya Cheng
PY  - 2022
UR  - https://arxiv.org/abs/2201.10790
ID  - 2201.10790
ER  -