@misc{indiciae0741a8134502,
  title = {Near-Surface Electrical Characterisation of Silicon Electronic Devices Using Focused keV Ions},
  author = {Simon G. Robson and Paul Räcke and Alexander M. Jakob and Nicholas Collins and Hannes R. Firgau and Vivien Schmitt and Vincent Mourik and Andrea Morello and Edwin Mayes and Daniel Spemann and David N. Jamieson},
  year = {2022},
  doi = {10.1103/physrevapplied.18.034037},
  url = {https://arxiv.org/abs/2201.11339},
  note = {Source identifier: 2201.11339}
}