@misc{indiciae2e6ff69696c3,
  title = {Reaction pathways of BCl\$\_3\$ for acceptor delta-doping of silicon},
  author = {Quinn Campbell and Kevin J. Dwyer and Sungha Baek and Andrew D. Baczewski and Robert E. Butera and Shashank Misra},
  year = {2022},
  url = {https://arxiv.org/abs/2201.11682},
  note = {Source identifier: 2201.11682}
}