@misc{indiciae5c4f66142480, title = {VarRCWA: An Adaptive High-Order Rigorous Coupled Wave Analysis Method}, author = {Ziwei Zhu and Changxi Zheng}, year = {2022}, doi = {10.1021/acsphotonics.2c00662}, url = {https://arxiv.org/abs/2201.12341}, note = {Source identifier: 2201.12341} }