@misc{indiciae0ed80d86f3b9, title = {Piezo-optomechanical cantilever modulators for VLSI visible photonics}, author = {Mark Dong and David Heim and Alex Witte and Genevieve Clark and Andrew J. Leenheer and Daniel Dominguez and Matthew Zimmermann and Y. Henry Wen and Gerald Gilbert and Dirk Englund and Matt Eichenfield}, year = {2022}, doi = {10.1063/5.0088424}, url = {https://arxiv.org/abs/2201.12447}, note = {Source identifier: 2201.12447} }