@misc{indiciae2cd35942c40e,
  title = {Three-temperature modeling of laser-induced damage process in silicon},
  author = {Prachi Venkat and Tomohito Otobe},
  year = {2022},
  doi = {10.35848/1882-0786/ac5edb},
  url = {https://arxiv.org/abs/2202.01964},
  note = {Source identifier: 2202.01964}
}