@misc{indiciae313071a2ab7b,
  title = {An optimized TEM specimen preparation method of quantum nanostructures},
  author = {Hongguang Wang and Vesna Srot and Bernhard Fenk and Gennadii Laskin and Jochen Mannhart and Peter A. van Aken},
  year = {2022},
  doi = {10.1016/j.micron.2020.102979},
  url = {https://arxiv.org/abs/2202.03840},
  note = {Source identifier: 2202.03840}
}