@misc{indiciaee1f6fce66ce2,
  title = {Closed-Loop MOEMS Accelerometer},
  author = {Majid Taghavi and Abolfazl Abedi and Gholam-Mohammad Parsanasab and Mojtaba Rahimi and Mohammad Noori and Hamzeh Nourolahi and hamid latifi},
  year = {2022},
  doi = {10.1364/oe.455772},
  url = {https://arxiv.org/abs/2202.05153},
  note = {Source identifier: 2202.05153}
}