@misc{indiciae2b51826bd178,
  title = {Towards controllable Si-doping in oxide molecular beam epitaxy using a solid SiO source: Application to \$β\$-Ga2O3},
  author = {A. Ardenghi and O. Bierwagen and A. Falkenstein and G. Hoffmann and J. Lähnemann and M. Martin and P. Mazzolini},
  year = {2022},
  doi = {10.1063/5.0087987},
  url = {https://arxiv.org/abs/2202.05762},
  note = {Source identifier: 2202.05762}
}