@misc{indiciaed5215bb3e366,
  title = {Integrated optical-readout of a high-Q mechanical out-of-plane mode},
  author = {Jingkun Guo and Simon Gröblacher},
  year = {2022},
  doi = {10.1038/s41377-022-00966-7},
  url = {https://arxiv.org/abs/2202.06336},
  note = {Source identifier: 2202.06336}
}