TY  - RPRT
TI  - Integrated optical-readout of a high-Q mechanical out-of-plane mode
AU  - Jingkun Guo
AU  - Simon Gröblacher
PY  - 2022
DO  - 10.1038/s41377-022-00966-7
UR  - https://arxiv.org/abs/2202.06336
ID  - 2202.06336
ER  -