@misc{indiciae49aaa927d1f6, title = {Wafer-scale low-disorder 2DEG in \$\textasciicircum{}\{28\}\$Si/SiGe without an epitaxial Si cap}, author = {Davide Degli Esposti and Brian Paquelet Wuetz and Viviana Fezzi and Mario Lodari and Amir Sammak and Giordano Scappucci}, year = {2022}, doi = {10.1063/5.0088576}, url = {https://arxiv.org/abs/2202.08090}, note = {Source identifier: 2202.08090} }