@misc{indiciaed2547cdd489f, title = {Vector Magnetic Current Imaging of an 8 nm Process Node Chip and 3D Current Distributions Using the Quantum Diamond Microscope}, author = {Sean M. Oliver and Dmitro J. Martynowych and Matthew J. Turner and David A. Hopper and Ronald L. Walsworth and Edlyn V. Levine}, year = {2022}, doi = {10.31399/asm.cp.istfa2021p0096}, url = {https://arxiv.org/abs/2202.08135}, note = {Source identifier: 2202.08135} }