@misc{indiciaeedd1752ccc34, title = {Radiation Hard 3D Silicon Pixel Sensors for use in the ATLAS Detector at the HL-LHC}, author = {Andreas Løkken Heggelund and Simon Huiberts and Ole Dorholt and Alexander Lincoln Read and Ole Røhne and Heidi Sandaker and Magne Lauritzen and Bjarne Stugu and Angela Kok and Ozhan Koybasi and Marco Povoli and Marco Bomben and Jörn Lange and Andre Rummler}, year = {2022}, url = {https://arxiv.org/abs/2202.10271}, note = {Source identifier: 2202.10271} }