@misc{indiciae0d1758594f4e,
  title = {A 5.3 GHz Al0.76Sc0.24N Two-Dimensional Resonant Rods Resonator with a kt2 of 23.9\%},
  author = {Xuanyi Zhao and Onurcan Kaya and Michele Pirro and Meruyert Assylbekova and Luca Colombo and Pietro Simeoni and Cristian Cassella},
  year = {2022},
  doi = {10.1109/jmems.2022.3178978},
  url = {https://arxiv.org/abs/2202.11284},
  note = {Source identifier: 2202.11284}
}