TY  - RPRT
TI  - A 5.3 GHz Al0.76Sc0.24N Two-Dimensional Resonant Rods Resonator with a kt2 of 23.9%
AU  - Xuanyi Zhao
AU  - Onurcan Kaya
AU  - Michele Pirro
AU  - Meruyert Assylbekova
AU  - Luca Colombo
AU  - Pietro Simeoni
AU  - Cristian Cassella
PY  - 2022
DO  - 10.1109/jmems.2022.3178978
UR  - https://arxiv.org/abs/2202.11284
ID  - 2202.11284
ER  -