@misc{indiciaeff2582d2fc89,
  title = {Imaging Scatterometer for Observing Changes to Optical Coatings During Air Annealing},
  author = {Michael Rezac and Daniel Martinez and Amy Gleckl and Joshua R. Smith},
  year = {2022},
  url = {https://arxiv.org/abs/2202.12393},
  note = {Source identifier: 2202.12393}
}