TY  - RPRT
TI  - Imaging Scatterometer for Observing Changes to Optical Coatings During Air Annealing
AU  - Michael Rezac
AU  - Daniel Martinez
AU  - Amy Gleckl
AU  - Joshua R. Smith
PY  - 2022
UR  - https://arxiv.org/abs/2202.12393
ID  - 2202.12393
ER  -