@misc{indiciae5d91dc318901,
  title = {Design and Fabrication of a Differential MOEMS Accelerometer Based on Fabry Perot micro-cavities},
  author = {Mojtaba Rahimi and Mohammad Malekmohammad and Majid Taghavi and Mohammad Noori and and Gholam Mohammad Parsanasab},
  year = {2022},
  doi = {10.1109/jsen.2022.3184979},
  url = {https://arxiv.org/abs/2203.02063},
  note = {Source identifier: 2203.02063}
}