TY  - RPRT
TI  - Design and Fabrication of a Differential MOEMS Accelerometer Based on Fabry Perot micro-cavities
AU  - Mojtaba Rahimi
AU  - Mohammad Malekmohammad
AU  - Majid Taghavi
AU  - Mohammad Noori and
AU  - Gholam Mohammad Parsanasab
PY  - 2022
DO  - 10.1109/jsen.2022.3184979
UR  - https://arxiv.org/abs/2203.02063
ID  - 2203.02063
ER  -