@misc{indiciaec170b55b3311,
  title = {Scaled indium oxide transistors fabricated using atomic layer deposition},
  author = {Mengwei Si and Zehao Lin and Zhizhong Chen and Xing Sun and Haiyan Wang and Peide D. Ye},
  year = {2022},
  doi = {10.1038/s41928-022-00718-w},
  url = {https://arxiv.org/abs/2203.02869},
  note = {Source identifier: 2203.02869}
}