@misc{indiciaebfdc7cea9589, title = {Nanoscale Fabrication of Graphene by Hydrogen-Plasma Etching}, author = {Takamoto Yokosawa and Masahiro Kamada and Taisuke Ochi and Yuki Koga and Rin Takehara and Masahiro Hara and Tomohiro Matsui}, year = {2022}, doi = {10.1380/ejssnt.2022-022}, url = {https://arxiv.org/abs/2203.05155}, note = {Source identifier: 2203.05155} }