@misc{indiciae361b35ce1af3,
  title = {Towards sub-30nm Contacted Gate Pitch, Forked Contact and Dynamically-Doped Nanosheets to Enhance Si and 2D Materials Device Scaling},
  author = {Aryan Afzalian and Zubair Ahmed and Julien Ryckaert},
  year = {2022},
  url = {https://arxiv.org/abs/2203.06364},
  note = {Source identifier: 2203.06364}
}