@misc{indiciae2724ada5e761,
  title = {Investigation of nonlinear squeeze-film damping involving rarefied gas effect in micro-electro-mechanical-systems},
  author = {Yong Wang and Sha Liu and Congshan Zhuo and Chengwen Zhong},
  year = {2022},
  url = {https://arxiv.org/abs/2203.06902},
  note = {Source identifier: 2203.06902}
}