TY  - RPRT
TI  - Investigation of nonlinear squeeze-film damping involving rarefied gas effect in micro-electro-mechanical-systems
AU  - Yong Wang
AU  - Sha Liu
AU  - Congshan Zhuo
AU  - Chengwen Zhong
PY  - 2022
UR  - https://arxiv.org/abs/2203.06902
ID  - 2203.06902
ER  -