@misc{indiciae997a01aae887,
  title = {Generic Lithography Modeling with Dual-band Optics-Inspired Neural Networks},
  author = {Haoyu Yang and Zongyi Li and Kumara Sastry and Saumyadip Mukhopadhyay and Mark Kilgard and Anima Anandkumar and Brucek Khailany and Vivek Singh and Haoxing Ren},
  year = {2022},
  url = {https://arxiv.org/abs/2203.08616},
  note = {Source identifier: 2203.08616}
}