TY  - RPRT
TI  - Generic Lithography Modeling with Dual-band Optics-Inspired Neural Networks
AU  - Haoyu Yang
AU  - Zongyi Li
AU  - Kumara Sastry
AU  - Saumyadip Mukhopadhyay
AU  - Mark Kilgard
AU  - Anima Anandkumar
AU  - Brucek Khailany
AU  - Vivek Singh
AU  - Haoxing Ren
PY  - 2022
UR  - https://arxiv.org/abs/2203.08616
ID  - 2203.08616
ER  -