@misc{indiciaecbc632ace045,
  title = {Self-aligned patterning technique for fabricating high-performance diamond sensor arrays with nanoscale precision},
  author = {Mengqi Wang and Haoyu Sun and Xiangyu Ye and Pei Yu and Hangyu Liu and Jingwei Zhou and Pengfei Wang and Fazhan Shi and Ya Wang and Jiangfeng Du},
  year = {2022},
  url = {https://arxiv.org/abs/2203.09320},
  note = {Source identifier: 2203.09320}
}