@misc{indiciaef69ac33a7948,
  title = {Compact superconducting microwave resonators based on Al-AlOx-Al capacitor},
  author = {Julia Zotova and Rui Wang and Alexander Semenov and Yu Zhou and Ivan Khrapach and Akiyoshi Tomonaga and Oleg Astafiev and Jaw-Shen Tsai},
  year = {2023},
  doi = {10.1103/physrevapplied.19.044067},
  url = {https://arxiv.org/abs/2203.09592},
  note = {Source identifier: 2203.09592}
}