TY  - RPRT
TI  - Compact superconducting microwave resonators based on Al-AlOx-Al capacitor
AU  - Julia Zotova
AU  - Rui Wang
AU  - Alexander Semenov
AU  - Yu Zhou
AU  - Ivan Khrapach
AU  - Akiyoshi Tomonaga
AU  - Oleg Astafiev
AU  - Jaw-Shen Tsai
PY  - 2023
DO  - 10.1103/physrevapplied.19.044067
UR  - https://arxiv.org/abs/2203.09592
ID  - 2203.09592
ER  -