@misc{indiciae99da64324d0f,
  title = {Study of residual stress in reactively sputtered epitaxial Si-doped GaN films},
  author = {Mohammad Monish and S. S. Major},
  year = {2022},
  doi = {10.1016/j.mssp.2022.106902},
  url = {https://arxiv.org/abs/2203.13463},
  note = {Source identifier: 2203.13463}
}