TY  - RPRT
TI  - Study of residual stress in reactively sputtered epitaxial Si-doped GaN films
AU  - Mohammad Monish
AU  - S. S. Major
PY  - 2022
DO  - 10.1016/j.mssp.2022.106902
UR  - https://arxiv.org/abs/2203.13463
ID  - 2203.13463
ER  -