@misc{indiciae6beff3e51008,
  title = {Mechanical investigations of free-standing SiN membranes patterned with one-dimensional photonic crystal structures},
  author = {Ali A. Darki and Robin V. Nielsen and Jens V. Nygaard and Aurélien Dantan},
  year = {2022},
  doi = {10.1063/5.0093016},
  url = {https://arxiv.org/abs/2203.13600},
  note = {Source identifier: 2203.13600}
}