TY  - RPRT
TI  - Mechanical investigations of free-standing SiN membranes patterned with one-dimensional photonic crystal structures
AU  - Ali A. Darki
AU  - Robin V. Nielsen
AU  - Jens V. Nygaard
AU  - Aurélien Dantan
PY  - 2022
DO  - 10.1063/5.0093016
UR  - https://arxiv.org/abs/2203.13600
ID  - 2203.13600
ER  -