@misc{indiciaea127ab926399,
  title = {Defect engineering of silicon with ion pulses from laser acceleration},
  author = {Walid Redjem and Ariel J. Amsellem and Frances I. Allen and Gabriele Benndorf and Jianhui Bin and Stepan Bulanov and Eric Esarey and Leonard C. Feldman and Javier Ferrer Fernandez and Javier Garcia Lopez and Laura Geulig and Cameron R. Geddes and Hussein Hijazi and Qing Ji and Vsevolod Ivanov and Boubacar Kante and Anthony Gonsalves and Jan Meijer and Kei Nakamura and Arun Persaud and Ian Pong and Lieselotte Obst-Huebl and Peter A. Seidl and Jacopo Simoni and Carl Schroeder and Sven Steinke and Liang Z. Tan and Ralf Wunderlich and Brian Wynne and Thomas Schenkel},
  year = {2022},
  url = {https://arxiv.org/abs/2203.13781},
  note = {Source identifier: 2203.13781}
}