TY  - RPRT
TI  - Innovating at Speed and at Scale: A Next Generation Infrastructure for Accelerating Semiconductor Technologies
AU  - Richard A. Gottscho
AU  - Edlyn V. Levine
AU  - Tsu-Jae King Liu
AU  - Paul C. McIntyre
AU  - Subhasish Mitra
AU  - Boris Murmann
AU  - Jan M. Rabaey
AU  - Sayeef Salahuddin
AU  - Willy C. Shih
AU  - H. -S. Philip Wong
PY  - 2022
UR  - https://arxiv.org/abs/2204.02216
ID  - 2204.02216
ER  -