@misc{indiciae154c254e3d8d,
  title = {SOI-based micro-mechanical terahertz detector operating at room-temperature},
  author = {K. Froberger and B. Walter and M. Lavancier and R. Peretti and G. Ducournau and J-F. Lampin and M. Faucher and S. Barbieri},
  year = {2022},
  doi = {10.1063/5.0095126},
  url = {https://arxiv.org/abs/2204.03970},
  note = {Source identifier: 2204.03970}
}