@misc{indiciae8f8683612610, title = {Simple coplanar waveguide resonator mask targeting metal-substrate interface}, author = {Cameron J. Kopas and Ella Lachman and Corey Rae H. McRae and Yuvraj Mohan and Josh Y. Mutus and Ani Nersisyan and Amrit Poudel}, year = {2022}, url = {https://arxiv.org/abs/2204.07202}, note = {Source identifier: 2204.07202} }