TY  - RPRT
TI  - On the Ohmic-dominant heating mode of capacitively-coupled plasma inverted by boundary electron emission
AU  - Shu Zhang
AU  - Guang-Yu Sun
AU  - Jian Chen
AU  - Hao-Min Sun
AU  - An-Bang Sun
AU  - Guan-Jun Zhang
PY  - 2022
DO  - 10.1063/5.0096316
UR  - https://arxiv.org/abs/2204.07252
ID  - 2204.07252
ER  -