@misc{indiciae6ca75c9e764c,
  title = {Solid Phase Recrystallization in Arsenic Ion-Implanted Silicon-On-Insulator by Microsecond UV Laser Annealing},
  author = {Toshiyuki Tabata and Fabien Rozé and Pablo Acosta Alba and Sebastien Halty and Pierre-Edouard Raynal and Imen Karmous and Sébastien Kerdilés and Fulvio Mazzamuto},
  year = {2022},
  doi = {10.1109/jeds.2021.3131911},
  url = {https://arxiv.org/abs/2204.12167},
  note = {Source identifier: 2204.12167}
}