@misc{indiciaed161b81a891c,
  title = {Wafer-scale nanofabrication of telecom single-photon emitters in silicon},
  author = {M. Hollenbach and N. Klingner and N. S. Jagtap and L. Bischoff and C. Fowley and U. Kentsch and G. Hlawacek and A. Erbe and N. V. Abrosimov and M. Helm and Y. Berencén and G. V. Astakhov},
  year = {2022},
  doi = {10.1038/s41467-022-35051-5},
  url = {https://arxiv.org/abs/2204.13173},
  note = {Source identifier: 2204.13173}
}