@misc{indiciaed393525c7170,
  title = {Density functional theory calculations for investigation of atomic structures of 4H-SiC/SiO\$\_2\$ interface after NO annealing},
  author = {Naoki Komatsu and Mizuho Ohmoto and Mitsuharu Uemoto and Tomoya Ono},
  year = {2022},
  doi = {10.1063/5.0102472},
  url = {https://arxiv.org/abs/2204.13870},
  note = {Source identifier: 2204.13870}
}