TY  - RPRT
TI  - Density functional theory calculations for investigation of atomic structures of 4H-SiC/SiO$_2$ interface after NO annealing
AU  - Naoki Komatsu
AU  - Mizuho Ohmoto
AU  - Mitsuharu Uemoto
AU  - Tomoya Ono
PY  - 2022
DO  - 10.1063/5.0102472
UR  - https://arxiv.org/abs/2204.13870
ID  - 2204.13870
ER  -