@misc{indiciaef8a157ad6bf4,
  title = {Modeling the Initial Stages of Si(100) Thermal Oxidation: An Ab-initio Approach},
  author = {Lukas Cvitkovich and Dominic Waldhör and Al-Moatassem El-Sayed and Markus Jech and Christoph Wilhelmer and Tibor Grasser},
  year = {2022},
  doi = {10.1016/j.apsusc.2022.155378.},
  url = {https://arxiv.org/abs/2204.13954},
  note = {Source identifier: 2204.13954}
}