TY  - RPRT
TI  - Modeling the Initial Stages of Si(100) Thermal Oxidation: An Ab-initio Approach
AU  - Lukas Cvitkovich
AU  - Dominic Waldhör
AU  - Al-Moatassem El-Sayed
AU  - Markus Jech
AU  - Christoph Wilhelmer
AU  - Tibor Grasser
PY  - 2022
DO  - 10.1016/j.apsusc.2022.155378.
UR  - https://arxiv.org/abs/2204.13954
ID  - 2204.13954
ER  -