@misc{indiciaeb1df32f67a59,
  title = {Impact of helium ion implantation dose and annealing on dense near-surface layers of NV centers},
  author = {A. Berzins and H. Grube and E. Sprugis and G. Vaivars and I. Fescenko},
  year = {2022},
  doi = {10.3390/nano12132234},
  url = {https://arxiv.org/abs/2204.14201},
  note = {Source identifier: 2204.14201}
}