TY  - RPRT
TI  - Impact of helium ion implantation dose and annealing on dense near-surface layers of NV centers
AU  - A. Berzins
AU  - H. Grube
AU  - E. Sprugis
AU  - G. Vaivars
AU  - I. Fescenko
PY  - 2022
DO  - 10.3390/nano12132234
UR  - https://arxiv.org/abs/2204.14201
ID  - 2204.14201
ER  -