@misc{indiciae13ee036ebaa6,
  title = {Subnanometer Accuracy of Surface Characterization by Reflected-Light Differential Interference Microscopy},
  author = {Ka Hung Chan and Shengwang Du and Xian Chen},
  year = {2022},
  doi = {10.1088/1361-6501/ac9ed2},
  url = {https://arxiv.org/abs/2205.00650},
  note = {Source identifier: 2205.00650}
}