TY  - RPRT
TI  - Subnanometer Accuracy of Surface Characterization by Reflected-Light Differential Interference Microscopy
AU  - Ka Hung Chan
AU  - Shengwang Du
AU  - Xian Chen
PY  - 2022
DO  - 10.1088/1361-6501/ac9ed2
UR  - https://arxiv.org/abs/2205.00650
ID  - 2205.00650
ER  -